Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11597854 | Method to increase barrier film removal rate in bulk tungsten slurry | William J. Ward, III, Ji Cui, Helin Huang | 2023-03-07 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11597854 | Method to increase barrier film removal rate in bulk tungsten slurry | William J. Ward, III, Ji Cui, Helin Huang | 2023-03-07 |