Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11610788 | Process chamber and substrate processing apparatus including the same | Yong-Jhin Cho, Young-Hoo Kim, Jihoon Jeong, Jung-Min Oh, Kuntack Lee +1 more | 2023-03-21 |
| 11590628 | Rotary body module and chemical mechanical polishing apparatus having the same | Yonghee Lee, Hyunjoon Park, Taemin Earmme, Seungchul Han, Byoungho Kwon +1 more | 2023-02-28 |