Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11699602 | Substrate support assemblies and components | Jian Li, Edward P. Hammond, IV, Vidyadharan Srinivasa Murthy Bangalore, Juan Carlos Rocha-Alvarez | 2023-07-11 |
| 11626303 | Compliance components for semiconductor processing system | — | 2023-04-11 |
| 11587773 | Substrate pedestal for improved substrate processing | Vinay Prabhakar, Venkata Sharat Chandra Parimi | 2023-02-21 |
| 11569072 | RF grounding configuration for pedestals | Satya THOKACHICHU, Edward P. Hammond, IV, Zheng John Ye, Abdul Aziz Khaja, Vinay Prabhakar | 2023-01-31 |
| 11560623 | Methods of reducing chamber residues | Liangfa Hu, Prashant Kumar Kulshreshtha, Anjana M. Patel, Abdul Aziz Khaja, Vinay Prabhakar +5 more | 2023-01-24 |