Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11745227 | Substrate cleaning devices and methods thereof | Steven M. Zuniga, Jay Gurusamy | 2023-09-05 |
| 11749552 | Wafer processing tools and methods thereof | Edward Golubovsky, Shaun Van Der Veen, Justin Ho Kuen Wong, Steven M. Zuniga | 2023-09-05 |
| 11735438 | Methods and apparatus for Marangoni drying | Edwin Velazquez | 2023-08-22 |
| 11721563 | Non-contact clean module | Adrian Blank, Edward Golubovsky, Balasubramaniam Coimbatore Jaganathan, Steven M. Zuniga, Ekaterina A. Mikhaylichenko +2 more | 2023-08-08 |
| 11705354 | Substrate handling systems | Gee Sun Hoey, Balasubramaniam Coimbatore Jaganathan | 2023-07-18 |
| 11693435 | Ethercat liquid flow controller communication for substrate processing systems | Ricardo L. Martinez, Hung Xuan Hoang, Dmitry Sklyar, Farooq Aleem, William Wadsworth +1 more | 2023-07-04 |