Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11693435 | Ethercat liquid flow controller communication for substrate processing systems | Ricardo L. Martinez, Dmitry Sklyar, Farooq Aleem, Jagan Rangarajan, William Wadsworth +1 more | 2023-07-04 |