Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830725 | Method of cleaning a structure and method of depositing a capping layer in a structure | Naomi Yoshida, Hao Jiang, Chenfei Shen, Chi-Chou Lin, Hao Chen +2 more | 2023-11-28 |
| 11776806 | Multi-step pre-clean for selective metal gap fill | Xi Cen, Yakuan Yao, Yiming Lai, Kai Wu, Avgerinos V. Gelatos +8 more | 2023-10-03 |
| 11749532 | Methods and apparatus for processing a substrate | Hao Jiang, Chi-Pin Lu, Mehul Naik | 2023-09-05 |
| 11705366 | Methods for controllable metal and barrier-liner recess | Amrita B. Mullick, Regina Freed, Mehul Naik, Uday Mitra | 2023-07-18 |
| 11615984 | Method of dielectric material fill and treatment | Shi YOU, Naomi Yoshida, Nikolaos Bekiaris, Mehul Naik, Martin Jay Seamons +2 more | 2023-03-28 |