Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11764069 | Asymmetry correction via variable relative velocity of a wafer | Jimin Zhang, Brian J. Brown, Eric Lau, Ekaterina A. Mikhaylichenko, Jeonghoon Oh | 2023-09-19 |
| 11717936 | Methods for a web-based CMP system | Dmitry Sklyar, Jeonghoon Oh, Jonathan P. Domin, Steven M. Zuniga, Jay Gurusamy | 2023-08-08 |