Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823928 | Control of wafer bow in multiple stations | David French, Sunil Kapoor, Yukinori Sakiyama, George Thomas | 2023-11-21 |
| 11725282 | Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate region | Chunguang Xia, Ramesh Chandrasekharan, Douglas Keil, Karl Leeser | 2023-08-15 |
| 11621150 | Mechanical suppression of parasitic plasma in substrate processing chamber | Douglas Keil, Karl Leeser, Mohamed Sabri | 2023-04-04 |