Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11733081 | Methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system | Bindusagar Marath Sankarathodi, Zhiyuan Ye, Jyothi RAJEEVAN, Ala Moradian, Zuoming ZHU +1 more | 2023-08-22 |
| 11615986 | Methods and apparatus for metal silicide deposition | Xuebin Li, Wei Liu, Gaurav Thareja, Shashank Sharma, Schubert S. Chu | 2023-03-28 |