Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848226 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2023-12-19 |
| 11615986 | Methods and apparatus for metal silicide deposition | Wei Liu, Gaurav Thareja, Shashank Sharma, Patricia M. Liu, Schubert S. Chu | 2023-03-28 |