Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854770 | Plasma processing with independent temperature control | Vladimir Nagorny, Rene George | 2023-12-26 |
| 11658006 | Plasma sources and plasma processing apparatus thereof | Vladimir Nagorny, Rene George | 2023-05-23 |
| 11615986 | Methods and apparatus for metal silicide deposition | Xuebin Li, Gaurav Thareja, Shashank Sharma, Patricia M. Liu, Schubert S. Chu | 2023-03-28 |
| D976001 | Box for transporting boards | Ming-Chien Chiu, Yung-Chin Pan, Tzu-Ning Huang | 2023-01-24 |