Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854770 | Plasma processing with independent temperature control | Wei Liu, Rene George | 2023-12-26 |
| 11658006 | Plasma sources and plasma processing apparatus thereof | Wei Liu, Rene George | 2023-05-23 |