SC

Shih-Ming Chang

TSMC: 11 patents #197 of 3,577Top 6%
Overall (2022): #6,422 of 548,613Top 2%
11
Patents 2022

Issued Patents 2022

Showing 1–11 of 11 patents

Patent #TitleCo-InventorsDate
11526081 Dummy insertion for improving throughput of electron beam lithography Wen Lo, Chun-Hung Liu, Chia-Hua Chang, Hsin-Wei Wu, Ta-Wei Ou +2 more 2022-12-13
11508661 Integrated circuit and method of manufacturing same Pochun Wang, Ting-Wei Chiang, Chih-Ming Lai, Hui-Zhong Zhuang, Jung-Chan Yang +6 more 2022-11-22
11467509 Lithography process monitoring method Chih-Jie Lee, Shih-Chun Huang, Ken-Hsien Hsieh, Yung-Sung Yen, Ru-Gun Liu 2022-10-11
11467488 Semiconductor apparatus and method of operating the same Wen Lo, Chun-Hung Liu 2022-10-11
11437239 Method for forming semiconductor device structure Chih-Ming Lai, Wei-Liang Lin, Chin-Yuan Tseng, Ru-Gun Liu 2022-09-06
11378894 Lithography system with an embedded cleaning module Shang-Chieh Chien, Jeng-Horng Chen, Jui-Ching Wu, Chia-Chen Chen, Hung-Chang Hsieh +3 more 2022-07-05
11327405 Method of manufacturing photo masks Chien-Cheng Chen, Chia-Jen Chen, Hsin-Chang Lee, Tran-Hui Shen, Yen-Cheng HO +1 more 2022-05-10
11307492 Method for forming photomask and photolithography method Minfeng Chen, Min-An Yang, Shao-Chi Wei 2022-04-19
11294286 Pattern formation method using a photo mask for manufacturing a semiconductor device Ru-Gun Liu, Chin-Hsiang Lin, Cheng-I Huang, Chih-Ming Lai, Chien-Wen Lai +2 more 2022-04-05
11289376 Methods for forming self-aligned interconnect structures Ru-Gun Liu, Hoi-Tou Ng 2022-03-29
11243472 Optical proximity correction and photomasks Dong-Yo Jheng, Ken-Hsien Hsieh, Chih-Jie Lee, Shuo-Yen Chou, Ru-Gun Liu 2022-02-08