Issued Patents 2022
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11526081 | Dummy insertion for improving throughput of electron beam lithography | Wen Lo, Chun-Hung Liu, Chia-Hua Chang, Hsin-Wei Wu, Ta-Wei Ou +2 more | 2022-12-13 |
| 11508661 | Integrated circuit and method of manufacturing same | Pochun Wang, Ting-Wei Chiang, Chih-Ming Lai, Hui-Zhong Zhuang, Jung-Chan Yang +6 more | 2022-11-22 |
| 11467509 | Lithography process monitoring method | Chih-Jie Lee, Shih-Chun Huang, Ken-Hsien Hsieh, Yung-Sung Yen, Ru-Gun Liu | 2022-10-11 |
| 11467488 | Semiconductor apparatus and method of operating the same | Wen Lo, Chun-Hung Liu | 2022-10-11 |
| 11437239 | Method for forming semiconductor device structure | Chih-Ming Lai, Wei-Liang Lin, Chin-Yuan Tseng, Ru-Gun Liu | 2022-09-06 |
| 11378894 | Lithography system with an embedded cleaning module | Shang-Chieh Chien, Jeng-Horng Chen, Jui-Ching Wu, Chia-Chen Chen, Hung-Chang Hsieh +3 more | 2022-07-05 |
| 11327405 | Method of manufacturing photo masks | Chien-Cheng Chen, Chia-Jen Chen, Hsin-Chang Lee, Tran-Hui Shen, Yen-Cheng HO +1 more | 2022-05-10 |
| 11307492 | Method for forming photomask and photolithography method | Minfeng Chen, Min-An Yang, Shao-Chi Wei | 2022-04-19 |
| 11294286 | Pattern formation method using a photo mask for manufacturing a semiconductor device | Ru-Gun Liu, Chin-Hsiang Lin, Cheng-I Huang, Chih-Ming Lai, Chien-Wen Lai +2 more | 2022-04-05 |
| 11289376 | Methods for forming self-aligned interconnect structures | Ru-Gun Liu, Hoi-Tou Ng | 2022-03-29 |
| 11243472 | Optical proximity correction and photomasks | Dong-Yo Jheng, Ken-Hsien Hsieh, Chih-Jie Lee, Shuo-Yen Chou, Ru-Gun Liu | 2022-02-08 |