Issued Patents 2022
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11444080 | Semiconductor structure cutting process and structures formed thereby | Chih-Chang Hung, Ming-Ching Chang, Shu-Yuan Ku, Yi-Hsuan Hsiao, I-Wei Yang | 2022-09-13 |
| 11435660 | Photomask and method of fabricating a photomask | Hsin-Chang Lee, Ping-Hsun Lin, Yen-Cheng HO, Chih-Cheng Lin | 2022-09-06 |
| 11430671 | Ozone wafer cleaning module having an ultraviolet lamp module with rotatable reflectors | Chen-Yang Lin, Chung-Hsuan Liu, Ku-Hsiang Sung, Kuan-Wen Lin, Hsin-Chang Lee | 2022-08-30 |
| 11422466 | Photomask including fiducial mark and method of making semiconductor device using the photomask | Hsin-Chang Lee, Ping-Hsun Lin, Chih-Cheng Lin | 2022-08-23 |
| 11349014 | Air spacer and method of forming same | Ming-Jhe Sie, Chen-Huang Huang, Shao-Hua Hsu, Cheng-Chung Chang, Szu-Ping Lee +2 more | 2022-05-31 |
| 11327405 | Method of manufacturing photo masks | Chien-Cheng Chen, Hsin-Chang Lee, Shih-Ming Chang, Tran-Hui Shen, Yen-Cheng HO +1 more | 2022-05-10 |
| 11294292 | Particle removing assembly and method of cleaning mask for lithography | Chen-Yang Lin, Da-Wei Yu, Li-Hsin Wang, Kuan-Wen Lin, Hsin-Chang Lee | 2022-04-05 |