Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11294292 | Particle removing assembly and method of cleaning mask for lithography | Chen-Yang Lin, Li-Hsin Wang, Kuan-Wen Lin, Chia-Jen Chen, Hsin-Chang Lee | 2022-04-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11294292 | Particle removing assembly and method of cleaning mask for lithography | Chen-Yang Lin, Li-Hsin Wang, Kuan-Wen Lin, Chia-Jen Chen, Hsin-Chang Lee | 2022-04-05 |