Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11430671 | Ozone wafer cleaning module having an ultraviolet lamp module with rotatable reflectors | Chen-Yang Lin, Chung-Hsuan Liu, Ku-Hsiang Sung, Chia-Jen Chen, Hsin-Chang Lee | 2022-08-30 |
| 11294292 | Particle removing assembly and method of cleaning mask for lithography | Chen-Yang Lin, Da-Wei Yu, Li-Hsin Wang, Chia-Jen Chen, Hsin-Chang Lee | 2022-04-05 |