Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11378894 | Lithography system with an embedded cleaning module | Shang-Chieh Chien, Jeng-Horng Chen, Chia-Chen Chen, Hung-Chang Hsieh, Chi-Lun Lu +3 more | 2022-07-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11378894 | Lithography system with an embedded cleaning module | Shang-Chieh Chien, Jeng-Horng Chen, Chia-Chen Chen, Hung-Chang Hsieh, Chi-Lun Lu +3 more | 2022-07-05 |