CL

Chi-Lun Lu

TSMC: 1 patents #1,889 of 3,577Top 55%
Overall (2022): #497,207 of 548,613Top 95%
1
Patents 2022

Issued Patents 2022

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11378894 Lithography system with an embedded cleaning module Shang-Chieh Chien, Jeng-Horng Chen, Jui-Ching Wu, Chia-Chen Chen, Hung-Chang Hsieh +3 more 2022-07-05