Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11467509 | Lithography process monitoring method | Chih-Jie Lee, Shih-Ming Chang, Ken-Hsien Hsieh, Yung-Sung Yen, Ru-Gun Liu | 2022-10-11 |
| 11289332 | Directional processing to remove a layer or a material formed over a substrate | Chin-Hsiang Lin, Chien-Wen Lai, Ru-Gun Liu, Wei-Liang Lin, Ya Hui Chang +3 more | 2022-03-29 |
| 11239078 | Fine line patterning methods | Chiu-Hsiang Chen, Ya-Wen Yeh, Yu-Tien Shen, Po-Chin Chang, Chien-Wen Lai +7 more | 2022-02-01 |