Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527399 | Wafer cleaning apparatus based on light irradiation and wafer cleaning system including the same | Byungkwon Cho, Sangjine Park, Seulgee Jeon, Jihoon Jeong, Seongsik Hong | 2022-12-13 |
| 11342203 | Substrate cleaning apparatus and substrate cleaning method using the same | Jihoon Jeong, Mihyun PARK, Kwangwook Lee, Kuntack Lee, Hayoung JEON +2 more | 2022-05-24 |
| 11302526 | Supercritical drying apparatus and method of drying substrate using the same | Sangjine Park, Byung-Kwon Cho, Jihoon Jeong, Youngtak KIM, Seulgee Jeon | 2022-04-12 |