Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11342203 | Substrate cleaning apparatus and substrate cleaning method using the same | Jihoon Jeong, Mihyun PARK, Yongsun Ko, Kuntack Lee, Hayoung JEON +2 more | 2022-05-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11342203 | Substrate cleaning apparatus and substrate cleaning method using the same | Jihoon Jeong, Mihyun PARK, Yongsun Ko, Kuntack Lee, Hayoung JEON +2 more | 2022-05-24 |