Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482410 | Apparatus including light source supplying light to wafer and window protector receiving a portion of chemical liquid | Hunjae JANG, Seungmin Shin, Seungho Kim, Younghoo Kim, Taehong Kim +1 more | 2022-10-25 |
| 11471996 | Conditioner, chemical mechanical polishing apparatus including the same and method of manufacturing a semiconductor device using the apparatus | Seungchul Han, Yonghee Lee, Taemin Earmme, Byoungho Kwon | 2022-10-18 |
| 11342203 | Substrate cleaning apparatus and substrate cleaning method using the same | Jihoon Jeong, Mihyun PARK, Yongsun Ko, Kwangwook Lee, Hayoung JEON +2 more | 2022-05-24 |