Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11390805 | Etching composition and method for manufacturing semiconductor device using the same | Jae Sung Lee, Jung Hun Lim, Changsu Jeon, Jung-Min Oh, Subin Oh +1 more | 2022-07-19 |
| 11342203 | Substrate cleaning apparatus and substrate cleaning method using the same | Jihoon Jeong, Yongsun Ko, Kwangwook Lee, Kuntack Lee, Hayoung JEON +2 more | 2022-05-24 |