Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527399 | Wafer cleaning apparatus based on light irradiation and wafer cleaning system including the same | Byungkwon Cho, Sangjine Park, Yongsun Ko, Seulgee Jeon, Seongsik Hong | 2022-12-13 |
| 11342203 | Substrate cleaning apparatus and substrate cleaning method using the same | Mihyun PARK, Yongsun Ko, Kwangwook Lee, Kuntack Lee, Hayoung JEON +2 more | 2022-05-24 |
| 11302526 | Supercritical drying apparatus and method of drying substrate using the same | Sangjine Park, Byung-Kwon Cho, Youngtak KIM, Yongsun Ko, Seulgee Jeon | 2022-04-12 |
| 11270761 | Dual-mode high-bandwidth SRAM with self-timed clock circuit | Hoan Huu Nguyen, Francois Ibrahim Atallah, Keith Alan Bowman, Daniel Yingling, Yu Pu | 2022-03-08 |