Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527399 | Wafer cleaning apparatus based on light irradiation and wafer cleaning system including the same | Byungkwon Cho, Yongsun Ko, Seulgee Jeon, Jihoon Jeong, Seongsik Hong | 2022-12-13 |
| 11424202 | Semiconductor devices having landing pads | Bowo Choi, Youngtak KIM, Suji Kim, Jaeuk SHIN, Hyunjung Lee +1 more | 2022-08-23 |
| 11393977 | Semiconductor device including vertical structures and a method of manufacturing the same | Jaeuk SHIN, Youngtak KIM, Hyeyeong Seo, Wonjun Lee | 2022-07-19 |
| 11302526 | Supercritical drying apparatus and method of drying substrate using the same | Byung-Kwon Cho, Jihoon Jeong, Youngtak KIM, Yongsun Ko, Seulgee Jeon | 2022-04-12 |
| 11217748 | Semiconductor device including a data storage material pattern | Youngtak KIM, Wonjun Lee, Hyeyeong Seo, Jaeuk SHIN | 2022-01-04 |