Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527399 | Wafer cleaning apparatus based on light irradiation and wafer cleaning system including the same | Byungkwon Cho, Sangjine Park, Yongsun Ko, Jihoon Jeong, Seongsik Hong | 2022-12-13 |
| 11302526 | Supercritical drying apparatus and method of drying substrate using the same | Sangjine Park, Byung-Kwon Cho, Jihoon Jeong, Youngtak KIM, Yongsun Ko | 2022-04-12 |