Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527399 | Wafer cleaning apparatus based on light irradiation and wafer cleaning system including the same | Byungkwon Cho, Sangjine Park, Yongsun Ko, Seulgee Jeon, Jihoon Jeong | 2022-12-13 |