Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11471996 | Conditioner, chemical mechanical polishing apparatus including the same and method of manufacturing a semiconductor device using the apparatus | Seungchul Han, Yonghee Lee, Taemin Earmme, Kuntack Lee | 2022-10-18 |
| 11322346 | Cleaning substrate method and method of processing substrate using the same | Yeongbong Park, Jisu Kim | 2022-05-03 |