Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11471996 | Conditioner, chemical mechanical polishing apparatus including the same and method of manufacturing a semiconductor device using the apparatus | Seungchul Han, Yonghee Lee, Byoungho Kwon, Kuntack Lee | 2022-10-18 |