Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482410 | Apparatus including light source supplying light to wafer and window protector receiving a portion of chemical liquid | Hunjae JANG, Seungmin Shin, Kuntack Lee, Seungho Kim, Taehong Kim +1 more | 2022-10-25 |