Issued Patents 2022
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515200 | Selective tungsten deposition within trench structures | Yi Xu, Yufei Hu, He Ren, Shi YOU, Kazuya Daito | 2022-11-29 |
| 11421322 | Blocker plate for use in a substrate process chamber | Xiaoxiong Yuan, Yi Xu, Kazuya Daito, Pingyan Lei, Dien-Yeh Wu +2 more | 2022-08-23 |
| 11417568 | Methods for selective deposition of tungsten atop a dielectric layer for bottom up gapfill | Wei Lei, Yi Xu, Tae Hong Ha, Raymond Hung, Shirish A. PETHE | 2022-08-16 |
| 11404313 | Selective tungsten deposition at low temperatures | Yi Xu, Yufei Hu, Kazuya Daito, Da He, Jiajie Cen | 2022-08-02 |
| 11387134 | Process kit for a substrate support | Muhannad Mustafa, Muhammad M. Rasheed, Avgerinos V. Gelatos, Vikash Banthia, Victor H Calderon +3 more | 2022-07-12 |
| 11380536 | Multi-step pre-clean for selective metal gap fill | Xi Cen, Yakuan Yao, Yiming Lai, Kai Wu, Avgerinos V. Gelatos +8 more | 2022-07-05 |
| 11355391 | Method for forming a metal gapfill | Xi Cen, Feiyue Ma, Kai Wu, Kazuya Daito, Yi Xu +13 more | 2022-06-07 |
| 11230508 | Green oxidizer compositions and methods | James E. Smith, Chen Zhang | 2022-01-25 |