Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495437 | Surface pretreatment process to improve quality of oxide films produced by remote plasma | Ting Xie, Hua Chung, Michael X. Yang | 2022-11-08 |
| 11495456 | Ozone for selective hydrophilic surface treatment | Ting Xie, Hua Chung, Michael X. Yang | 2022-11-08 |
| 11387111 | Processing of workpieces with reactive species generated using alkyl halide | Michael X. Yang, Hua Chung | 2022-07-12 |
| 11289374 | Nucleation-free gap fill ALD process | Yihong Chen, Kelvin Chan, Srinivas Gandikota, Yong Wu, Susmit Singha Roy +1 more | 2022-03-29 |
| 11257680 | Methods for processing a workpiece using fluorine radicals | Qi Zhang | 2022-02-22 |
| 11251050 | Silicon oxide selective dry etch process | Qi Zhang, Hua Chung, Haichun Yang | 2022-02-15 |