Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11529592 | Gas injector with baffle | Lara Hawrylchak, Eric Kihara Shono, Kartik Shah, Christopher S. Olsen, Sairaju Tallavarjula +4 more | 2022-12-20 |
| 11532463 | Semiconductor processing chamber and methods for cleaning the same | Vinay Prabhakar, Bushra Afzal, Badri Narayan Ramamurthi, Juan Carlos Rocha-Alvarez | 2022-12-20 |
| 11515132 | Physical vapor deposition processing systems target cooling | Sanjay Bhat, Vibhu Jindal | 2022-11-29 |
| 11501945 | Side inject designs for improved radical concentrations | Eric Kihara Shono, Christopher S. Olsen, Hansel LO, Agus Sofian Tjandra, Taewan Kim +1 more | 2022-11-15 |
| 11501954 | Dogbone inlet cone profile for remote plasma oxidation chamber | Kartik Shah, Christopher S. Olsen, Agus Sofian Tjandra, Hansel LO, Eric Kihara Shono +1 more | 2022-11-15 |
| 11486038 | Asymmetric injection for better wafer uniformity | Eric Kihara Shono, Christopher S. Olsen, Kartik Shah, Hansel LO, Tobin Kaufman-Osborn +3 more | 2022-11-01 |