| 11495932 |
Slip ring for use in rotatable substrate support |
Muhannad Mustafa, Yu Chang, William Kuang, Xiping Huo |
2022-11-08 |
| 11479859 |
High temperature vacuum seal |
Muhannad Mustafa |
2022-10-25 |
| 11447866 |
High temperature chemical vapor deposition lid |
Muhannad Mustafa, Mario D. Sanchez, Srinivas Gandikota, Wei V. Tang |
2022-09-20 |
| 11427912 |
High temperature rotation module for a processing chamber |
Muhannad Mustafa |
2022-08-30 |
| 11420217 |
Showerhead for ALD precursor delivery |
Muhannad Mustafa |
2022-08-23 |
| 11415147 |
Pumping liner for improved flow uniformity |
Muhannad Mustafa, Mario D. Sanchez |
2022-08-16 |
| 11408530 |
Valve for varying flow conductance under vacuum |
Muhannad Mustafa |
2022-08-09 |
| D959516 |
Compression fitting |
Muhannad Mustafa |
2022-08-02 |
| 11387134 |
Process kit for a substrate support |
Muhannad Mustafa, Yu Lei, Avgerinos V. Gelatos, Vikash Banthia, Victor H Calderon +3 more |
2022-07-12 |
| 11384432 |
Atomic layer deposition chamber with funnel-shaped gas dispersion channel and gas distribution plate |
Srinivas Gandikota, Mario D. Sanchez, Guoqiang Jian, Yixiong Yang, Deepak Jadhav +1 more |
2022-07-12 |
| 11236424 |
Process kit for improving edge film thickness uniformity on a substrate |
Muhannad Mustafa |
2022-02-01 |
