Issued Patents 2022
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11406972 | Activation of protected cross-linking catalysts during formation of dielectric materials | James M. Blackwell, David J. Michalak, Jessica M. Torres, Jeffery D. Bielefeld | 2022-08-09 |
| 11373950 | Advanced lithography and self-assembled devices | Richard E. Schenker, Robert L. Bristol, Kevin Lin, Florian Gstrein, James M. Blackwell +6 more | 2022-06-28 |
| 11320734 | Ligand-capped main group nanoparticles as high absorption extreme ultraviolet lithography resists | James M. Blackwell, Robert L. Bristol, Florian Gstrein | 2022-05-03 |
| 11315798 | Two-stage bake photoresist with releasable quencher | Robert L. Bristol, James M. Blackwell, Florian Gstrein, Kent N. FRASURE | 2022-04-26 |
| 11262654 | Chain scission resist compositions for EUV lithography applications | Lauren Doyle, Patrick Theofanis, James M. Blackwell, Eungnak Han | 2022-03-01 |
| 11251072 | Differential hardmasks for modulation of electrobucket sensitivity | Kevin Lin, Robert L. Bristol, James M. Blackwell, Rami Hourani | 2022-02-15 |
| 11227766 | Metal oxide nanoparticles as fillable hardmask materials | Florian Gstrein, Manish Chandhok | 2022-01-18 |
| 11217456 | Selective etching and controlled atomic layer etching of transition metal oxide films for device fabrication | James M. Blackwell, Scott B. Clendenning, Cen Tan | 2022-01-04 |