Issued Patents 2022
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11373950 | Advanced lithography and self-assembled devices | Richard E. Schenker, Kevin Lin, Florian Gstrein, James M. Blackwell, Marie Krysak +6 more | 2022-06-28 |
| 11373900 | Damascene plug and tab patterning with photobuckets | Kevin Lin, Richard E. Schenker | 2022-06-28 |
| 11320734 | Ligand-capped main group nanoparticles as high absorption extreme ultraviolet lithography resists | Marie Krysak, James M. Blackwell, Florian Gstrein | 2022-05-03 |
| 11315798 | Two-stage bake photoresist with releasable quencher | Marie Krysak, James M. Blackwell, Florian Gstrein, Kent N. FRASURE | 2022-04-26 |
| 11300885 | EUV phase-shift SRAF masks by means of embedded phase shift layers | Guojing Zhang, Tristan A. Tronic, John Magana, Chang Ju Choi, Arvind Sundaramurthy +1 more | 2022-04-12 |
| 11276581 | Textile patterning for subtractively-patterned self-aligned interconnects, plugs, and vias | Kevin Lin, Alan M. Myers | 2022-03-15 |
| 11251072 | Differential hardmasks for modulation of electrobucket sensitivity | Kevin Lin, James M. Blackwell, Rami Hourani, Marie Krysak | 2022-02-15 |