Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11300885 | EUV phase-shift SRAF masks by means of embedded phase shift layers | Robert L. Bristol, Guojing Zhang, Tristan A. Tronic, John Magana, Chang Ju Choi +1 more | 2022-04-12 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11300885 | EUV phase-shift SRAF masks by means of embedded phase shift layers | Robert L. Bristol, Guojing Zhang, Tristan A. Tronic, John Magana, Chang Ju Choi +1 more | 2022-04-12 |