Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11262654 | Chain scission resist compositions for EUV lithography applications | Lauren Doyle, Marie Krysak, James M. Blackwell, Eungnak Han | 2022-03-01 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11262654 | Chain scission resist compositions for EUV lithography applications | Lauren Doyle, Marie Krysak, James M. Blackwell, Eungnak Han | 2022-03-01 |