Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11512387 | Methods and apparatus for passivating a target | Chao Du, Xing CHEN, Keith A. Miller, Jianxin Lei | 2022-11-29 |
| 11495461 | Film stack for lithography applications | Tejinder Singh, Suketu Arun Parikh, Daniel Lee Diehl, Michael Stolfi, Yong Cao +3 more | 2022-11-08 |
| 11469096 | Method and chamber for backside physical vapor deposition | Chunming Zhou, Yong Cao, Kevin Moraes, Shane Lavan | 2022-10-11 |
| 11447857 | Methods and apparatus for reducing tungsten resistivity | Wenting Hou, Jianxin Lei, Prashanth Kothnur, William Johanson | 2022-09-20 |
| 11450514 | Methods of reducing particles in a physical vapor deposition (PVD) chamber | Wei Dou, Yong Cao, Mingdong Li, Shane Lavan, Chengyu Liu | 2022-09-20 |
| 11270898 | Apparatus for enhancing flow uniformity in a process chamber | Kirankumar Neelasandra SAVANDAIAH, Fuhong Zhang, William Johanson | 2022-03-08 |