Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508828 | Selective silicon etch for gate all around transistors | Myungsun Kim, Benjamin Colombeau, Sanjay Natarajan | 2022-11-22 |
| 11495461 | Film stack for lithography applications | Tejinder Singh, Suketu Arun Parikh, Daniel Lee Diehl, Jothilingam Ramalingam, Yong Cao +3 more | 2022-11-08 |