Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469096 | Method and chamber for backside physical vapor deposition | Chunming Zhou, Jothilingam Ramalingam, Yong Cao, Kevin Moraes | 2022-10-11 |
| 11450514 | Methods of reducing particles in a physical vapor deposition (PVD) chamber | Wei Dou, Yong Cao, Mingdong Li, Jothilingam Ramalingam, Chengyu Liu | 2022-09-20 |