Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11473189 | Method for particle removal from wafers through plasma modification in pulsed PVD | Lei Zhou, Adolph Miller Allen, Vaibhav Soni, Kishor Kalathiparambil, Vanessa Faune +1 more | 2022-10-18 |
| 11289312 | Physical vapor deposition (PVD) chamber with in situ chamber cleaning capability | Adolph Miller Allen, Vanessa Faune, Zhong Qiang Hua, Kirankumar Neelasandra SAVANDAIAH, Anantha K. Subramani +5 more | 2022-03-29 |
| 11249390 | Extreme ultraviolet mask absorber materials | Shuwei Liu, Vibhu Jindal | 2022-02-15 |
| 11251024 | Coating for chamber particle reduction | Hsin-wei Tseng, Casey Jane Madsen, Yikai Chen, Irena H. Wysok | 2022-02-15 |