Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11295938 | Multi-radius magnetron for physical vapor deposition (PVD) and methods of use thereof | Jiao Song, Anthony Chih-Tung Chan, David Gunther, Kirankumar Neelasandra SAVANDAIAH | 2022-04-05 |
| 11251024 | Coating for chamber particle reduction | Hsin-wei Tseng, Casey Jane Madsen, Yikai Chen, Halbert Chong | 2022-02-15 |