Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11511389 | Polishing head and polishing apparatus | Kenichi Akazawa, Makoto Kashiwagi, Yu Ishii, Atsushi Yoshida, Kenichi Kobayashi +1 more | 2022-11-29 |
| 11478895 | Substrate holding device, substrate polishing apparatus, and method of manufacturing the substrate holding device | Shingo Togashi, Makoto Fukushima, Osamu Nabeya | 2022-10-25 |
| 11465254 | Polishing machine and a polishing method for a substrate | Itsuki Kobata, Katsuhide Watanabe, Yuji Yagi, Nobuyuki Takahashi, Koichi Takeda | 2022-10-11 |
| 11224956 | Polishing apparatus | Osamu Nabeya, Tetsuji Togawa, Makoto Fukushima | 2022-01-18 |