Issued Patents 2022
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11511389 | Polishing head and polishing apparatus | Kenichi Akazawa, Yu Ishii, Atsushi Yoshida, Kenichi Kobayashi, Tetsuji Togawa +1 more | 2022-11-29 |
| 11511386 | Polishing apparatus and polishing method | Masaya Seki, Masayuki Nakanishi | 2022-11-29 |
| 11456406 | Silicon bulk thermoelectric conversion material | Junichiro SHIOMI, Takashi Kodama | 2022-09-27 |
| 11400561 | Top ring for holding a substrate and substrate processing apparatus | Kenichi Kobayashi, Asagi Matsugu, Manao Hoshina | 2022-08-02 |
| 11370080 | Polishing head for holding substrate and substrate processing apparatus | Kenichi Kobayashi | 2022-06-28 |
| 11335588 | Substrate holding apparatus and substrate processing apparatus | — | 2022-05-17 |
| 11331768 | Polishing head and polishing apparatus | Fong-Jie Du, Manao Hoshina | 2022-05-17 |
| 11305399 | Jig for a polishing apparatus | Kenichi Kobayashi, Asagi Matsugu, Manao Hoshina | 2022-04-19 |