Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11400561 | Top ring for holding a substrate and substrate processing apparatus | Kenichi Kobayashi, Asagi Matsugu, Makoto Kashiwagi | 2022-08-02 |
| 11331768 | Polishing head and polishing apparatus | Makoto Kashiwagi, Fong-Jie Du | 2022-05-17 |
| 11305399 | Jig for a polishing apparatus | Kenichi Kobayashi, Asagi Matsugu, Makoto Kashiwagi | 2022-04-19 |