Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11511389 | Polishing head and polishing apparatus | Kenichi Akazawa, Makoto Kashiwagi, Atsushi Yoshida, Kenichi Kobayashi, Tetsuji Togawa +1 more | 2022-11-29 |
| 11446784 | Chemical mechanical polishing apparatus for polishing workpiece | Kenya Ito, Hitoshi Morinaga, Kazusei Tamai, Shingo OHTSUKI, Hiroshi Asano | 2022-09-20 |
| 11436392 | Substrate processing apparatus and storage medium having program stored therein | Keisuke Uchiyama, Kunio Oishi, Hiroyuki Takenaka | 2022-09-06 |