Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11498182 | Polishing method and polishing pad | Toru Kamada, Koji Katayama, Takashi Horibe | 2022-11-15 |
| 11446784 | Chemical mechanical polishing apparatus for polishing workpiece | Yu Ishii, Kenya Ito, Kazusei Tamai, Shingo OHTSUKI, Hiroshi Asano | 2022-09-20 |