Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11511389 | Polishing head and polishing apparatus | Kenichi Akazawa, Makoto Kashiwagi, Yu Ishii, Atsushi Yoshida, Kenichi Kobayashi +1 more | 2022-11-29 |
| 11440161 | Polishing head for face-up type polishing apparatus, polishing apparatus including the polishing head, and polishing method using the polishing apparatus | Kenichi Kobayashi | 2022-09-13 |
| 11373894 | Substrate processing apparatus and substrate holding apparatus | Kenichi Kobayashi | 2022-06-28 |
| 11224956 | Polishing apparatus | Osamu Nabeya, Makoto Fukushima, Hozumi Yasuda | 2022-01-18 |