Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11478895 | Substrate holding device, substrate polishing apparatus, and method of manufacturing the substrate holding device | Shingo Togashi, Hozumi Yasuda, Osamu Nabeya | 2022-10-25 |
| 11472000 | Substrate adsorption method, substrate holding apparatus, substrate polishing apparatus, elastic film, substrate adsorption determination method for substrate holding apparatus, and pressure control method for substrate holding apparatus | Hiroyuki Shinozaki, Osamu Nabeya | 2022-10-18 |
| 11472001 | Elastic membrane and substrate holding apparatus | Cheng Cheng, Shingo Togashi, Kazuto Hirokawa | 2022-10-18 |
| 11224956 | Polishing apparatus | Osamu Nabeya, Tetsuji Togawa, Hozumi Yasuda | 2022-01-18 |